White light interferometry for quantitative surface characterization in ion sputtering experiments
نویسندگان
چکیده
منابع مشابه
White Light Spectral Interferometry for Real-time Surface Profile Measurement
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ژورنال
عنوان ژورنال: Applied Surface Science
سال: 2012
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2012.03.144